Vacuum & Surface Science Laboratory
08 Mar 2017
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A state of the art vacuum and surface science laboratory.

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​​​​​​Vacuum Science Laboratory, ​STFC Daresbury​​​​​​​

 

Vacuum Science Expertise

  • Advanced modelling of gas flow in vacuum systems
  • Vacuum system design
  • Extreme High Vacuum (XHV) techniques and applications
  • Instrumentation and vacuum metrology
  • Leading ultra-high vacuum levels​
  • Full solution including modelling, cleaning, processing and validation

​Surface Science Facilities

Thin films and multilayer coatings:

  • Physical Vapour Deposition - PVD​
  • Chemical Vapour Deposition - CVD
  • Molecular Beam Epitaxy
  • Atomic Layer Deposition - ALD

Analysis techniques​:

  • Rutherford Backscattering - RBS
  • Nuclear Reaction Analysis - NRA
  • Medium and Low Energy Ion Scattering - MEIS and LEIS
  • Auger Electron Spectroscopy - AES
  • X-Ray Photoelectron Spectroscopy - XPS
  • Secondary Ion Mass Spectroscopy - SIMS
  • Scanning Electron Microscopy - SEM
  • Tunnelling Electron Microscopy - TEM​​​

​Contact

F​or further information please email AMICI@stfc.ac.uk

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